January 18 2018
Prof. Maruyama’s paper has been published in Sensors!
Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection,
Satoshi Maruyama, Takeshi Hizawa, Takahashi Kazuhiro and Kazuaki Sawada,
Sensors 2018, 18(1), 138; doi:10.3390/s18010138
