◆BERKELEY SENSOR & ACTUATOR CENTER

Affiliation: UC BERKELEY, USA

Comment: 世界のBSAC!

 

◆MEMS@MIT

Affiliation: Massachusetts Institute of Technology, USA

Comment:

 

◆microfab

Affiliation: University of Utah, USA

Comment: Si Probeが有名

 

◆MEMS Laboratory

Affiliation: Carnegie Mellon University, USA

Comment:

 

◆METUMEMS

Affiliation: Middle East Technical University, Turkey

Comment: Prof.AKINの研究グループ