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国際会議 2004

  • H. Takao, Y. Ito, K. Serge, K. Sawada & M. Ishida
    “Low-Noise Fully Differential Amplifiers for High Resolution Smart Sensors Using JFET-CMOS Technology
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp.20-25, Sapporo, Japan, July 4-7, 2004.
  • K. I. Lee, H. Takao, K. Sawada, H. D. Seo & M. Ishida
    “Thermal Response Analysis of a Temperature Controlled Three-axis Accelerometer for High Temperatures with Integrated Microheaters and Temperature Sensors”
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp.449-452, Sapporo, Japan, July 4-7, 2004.
  • K. I. Lee, M. M. Nayak, H. Takao, K. Sawada & M. Ishida
    “MEMS Based High Dose Radiation Resistant SOI Pressure Sensor”
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp.1317-1321, Sapporo, Japan, July 4-7, 2004.
  • Y. T. Lee, H. Takao & M. Ishida
    “Fabrication of the High Temperature Silicon Pressure Sensor”
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp.749-752, Sapporo, Japan, July 4-7, 2004.
  • A. Wakahara, R. Tanaka, S. Hatakenaka, H. Okada, A. Yoshida & M. Ishida
    “Growth of GaN on Si Substrate Using gamma-Al2O3 Epitaxial Template for MEMS Applications
    Int. Conf. on Electrical Engineering 2004/ Asia-Pasific Conf. on Transducers and Micro-Nano Technology 2004 (ICEE2004/APCOT MNT 2004), July 4-8, 2004, Sapporo, PO3-17, Proceedings, Vol.1, pp.670-673
  • Y. Kato, H. Takao, K. Sawada & M. Ishida
    “Device Characteristics of MOSFETs for Smart Sensor Systems on Si(111)”
    Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT MNT 2004), pp.112-116, Sapporo, Japan, July 4-7, 2004.
  • T. Okada, M.d. Shahjahan, K. Sawada & M. Ishida
    “A novel epitaxial growth technique of ultrathin single crystalline gamma-Al2O3 films with very smooth surface on Si”
    2004 Materials Research Society (MRS) FALL MEETING ABSTRACTs (Boston,USA) pp.221
  • Y. Maruyama, K. Sawada, H. Takao & M. Ishida
    “Novel Filter Less Fluorescence Detection Sensor Array for DNA Micro Chip”
    Proceedings of 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, pp. 491～493, Malmo, Sweden
  • T. Hizawa, K. Sawada, H. Takao & M. Ishida
    “Fabrication of pH CMOS Image Sensor for Chemical Reaction Imaging”
    Proceedings of 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, pp. 440～442, Malmo, Sweden”
  • D. Noda, M. Hatakeyama, M. Kyogoku, K. Ikusima, K. Sawada & M. Ishida
    “Fabrication of Si field emitter array in local vacuum package”
    Technocal Digest of 17th International Vacuum Nanoelectronics Conference (Cambridge, MA, USA) pp.292-293 (2004)
  • V. Radhakrishna, Y. Kato, H. Takao, K. Sawada & M. Ishida
    Laser Micro-Raman Analysis of Intgerface Stress in Si/SiO2 Structure”
    Proceedings of 12th International Conference on Solid Films and Structures (ICSFS-12), p216, Hamamatsu, Japan
  • M. Shofiqul Islam, H. Ishino, T. Kawano, H. Takao, K. Sawada & M. Ishida
    Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method”
    Proceedings of SSDM, Tokyo, Japan
  • T. Kawano, H. Takao, K. Sawada & M. Ishida
    “Neural Recording Chip with Penetrating Si Microprobe Electrode Array by Selective Vapor-Liquid-Solid Growth Method”
    Proceedings of the 26th Annual International Conference of the IEEE Eng. Med. Biological Society (IEEE EMBS), pp. 2066～2069, San Francisco, CA, USA
  • T. Kawano, A. Ishihara, T. Harimoto, H. Takao, K. Sawada, S. Usui & M. Ishida
    “Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system”
    2004 International Electron Device Meeting (IEEE IEDM 2004), pp. 1013～1016, San Francisco, USA
  • K. I. Lee, H. Takao, K. Sawada & M. Ishida
    “Analysis and Experimental Verification of Thermal Drift in a Constant Temperature Control Type Three-Axis Accelerometer for High Temperatures with a Novel Composition of Wheatstone Bridge”
    Proceedings of IEEE The 17th Annual International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004), pp.241-244, Maastricht, Netherlands, Jan. 25-29, (2004)
  • H. Takao, K. Sawada & M. Ishida
    “Silicon Smart Tactile Image Sensor with Pneumatically Swollen Single Diaphragm Structure”
    Proceedings of The 17th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2004), pp.846-849, Maastricht, The Netherlands, Jan. 25-29, (2004)