論文 2007
- W. H. Lee, Y. T. Lee, H. Takao, K. Sawada, M. Ishida
Fabrication of Thermoelectric Sensor Using Silicon-on-Insulator Structure
Jpn. J. Appl. Phys., Vol.46, No.11, pp.7232-7236, Nov., 2007.
doi : 10.1143/JJAP.46.7232
- R. Vatedka, H. Takao, K. Swada, M. Ishida
Effect of high drain voltage on stress sensitivity in nMOSFETs
Sens. Actuator A-Phys., Vol.140, Issue 1, pp.89-93, Oct., 2007.
doi : 10.1016/j.sna.2007.06.019
- D. Noda, M. Hatakeyama, K. Nishijyou, K. Sawada, M.Ishida
Development of Cavity Structure for Field Emission on Si Substrate
Jpn. J. Appl. Phys., Vol. 46, No. 9B, pp.6433-6436, Sep., 2007.
doi : 10.1143/JJAP.46.6433
- M. Sudou, H. Takao, K. Sawada, M. Ishida
Wafer-Level Integration Technique of Surface Mount Devices on a Si-Wafer With Vibration Energy and Gravity Force
IEEE Trans. Compon. Pack. Manuf. Technol., Vol.30, Issue 3, pp.457-463, Sep., 2007.
doi : 10.1109/TCAPT.2007.898742
- Md. Shofiqul Islam, T. Kawashima, K. Sawada, M. Ishida
High-yield growth of p-Si microprobe arrays by selective vapor-liqid-solid method using in situ doping and their properties
J. Cryst. Growth, Vol.306, Issue 2, pp.276-282, Aug., 2007.
doi : 10.1016/j.jcrysgro.2007.05.021
- J. W. Kim, H. Takao, K. Sawada, M. Ishida
Integrated inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
Sensors, Vol.7, Issue 8, pp.1387-1398, Aug., 2008.
doi : 10.3390/s7081387
- Y. Guo, D. Akai, K. Sawada, M. Ishida
Ferroelectric and pyroelectric properties of highly (110)-oriented Pb(Zr0.40 Ti0.60) O3 this films grown on Pt/laNiO3/SiO2/Si substrates
Appl. Phys. Lett., Vol.90, Issue 23, pp.232908, Jun., 2007.
doi : 10.1063/1.2746949
- D. Noda, M. Hatakeyama, K. Nishijyou, K. Sawada, M. Ishida
Fabrication of local microvacuum package incorporating Si field emitter array and Ti getter
J. Vac. Sci. Technol. B, Vol.25, Issue 3, pp.931-934, May/Jun., 2007.
doi : 10.1116/1.2720851
- K. Sawada, C. Oda, H. Takao, M. Ishida
Smart Microfluidic Electrochemical DNA Sensors with Signal Processing Circuits
Jpn. J. Appl. Phys., Vol.46, No.5A, pp.3135-3138, May, 2007.
doi : 10.1143/JJAP.46.3135
- J. W. Kim, H. Takao, K. Sawada, M. Ishida
Development of Radio Frequency Transmitters Including On-chip Antenna for Intelligent Human Sensing Systems
IEEJ Trans on Electr. Electron. Eng., Vol.2, Issue 3, pp.365-371, May, 2007.
doi : 10.1002/tee.20151
- H. Khatun Mst, M. Shahjahan, K. Sawada, M. Ishida
Capacitance-Voltage Characteristics and swatching time of double barrier resonant tunneling diode fabricated with epi-Si and γ-Al2O3
Physica E, Vol.36, Issue 1, pp.123-127, Jan., 2007.
doi : 10.1016/j.physe.2006.09.006
- H. Takao, M. Ishida
Pneumatic MEMS In-Channel Microvalves with In-Plane Control Ports for Micro Fluidic Systems Integrated on a Chip Surface
Sens. Mater., Vol.19, No.1, pp.019-034, 2007.
- M. Ishida, T. Kawashima
Micro-probe Array Chips for Nerve Potential Detection
機能材料, Vol.27, No.5, pp.53-61, 2007.
- M. Ito, K. Sawada, M.Ishida
High quality epitaxial Pt films grown on γ-Al O /Si (111) substrates
Solid State Phenomena, Vol.124-126, Part 1, pp.181-184, 2007.