Semiconductor Manufacturing Equipment (including shared equipment)
EB evaporator 
EB lithography 
ICP-RIE for GaN 
LED transfer tool 
LP-CVD (poly-Si, SiN,SiO2) 
Deep-RIE 
XeF2 Dry Etching Equipment 
Asher apparatus 
Sintering Furnace 
Blade Dicing equipment 
Palylene Coater 
Plasma-enhaced CVD 
Resist Spray Coater 
Reactive Ion Etching using F-based gas 
Wire Bonding equipment 
Mask Aligner
Evaluation Tools
Probe Station 
Angle resolved PL or EL Evaluation System 
MicroPL System 
FE-SEM 
Stylus-type Step Profiler 
Electric Measuring Instrument