{"id":125,"date":"2010-05-02T23:59:23","date_gmt":"2010-05-02T14:59:23","guid":{"rendered":"http:\/\/int.ee.tut.ac.jp\/icg\/wp\/?p=125"},"modified":"2010-05-11T23:46:01","modified_gmt":"2010-05-11T14:46:01","slug":"%e5%9b%ba%e4%bd%93%e6%a9%9f%e8%83%bd%e3%83%87%e3%83%90%e3%82%a4%e3%82%b9%e6%96%bd%e8%a8%ad","status":"publish","type":"post","link":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/?p=125","title":{"rendered":"\u56fa\u4f53\u6a5f\u80fd\u30c7\u30d0\u30a4\u30b9\u65bd\u8a2d"},"content":{"rendered":"\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u8d85\u7d14\u6c34\u88fd\u9020\u88c5\u7f6e<\/span><\/td>\n\u5316\u5b66\u51e6\u7406\u7528\u30af\u30ea\u30fc\u30f3\u30d9\u30f3\u30c1<\/span><\/td>\n<\/tr>\n
N2<\/sub>\u30d6\u30ed\u30fc\u30ac\u30f3<\/span><\/td>\n\u56de\u8ee2\u5f0f\u30a6\u30a7\u30cf\u4e7e\u71e5\u6a5f<\/span><\/td>\n<\/tr>\n
4\u30a4\u30f3\u30c1\u5bfe\u5fdc\u9178\u5316\u30fb\u30a2\u30cb\u30fc\u30eb\u7089<\/span><\/td>\n4\u30a4\u30f3\u30c1\u5bfe\u5fdc\u30ea\u30f3\u62e1\u6563\u7089<\/span><\/td>\n<\/tr>\n
\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<\/span><\/td>\nAl\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e<\/span><\/td>\n<\/tr>\n
\u91d1\u5c5e\u819c(3\u5143)\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e<\/span><\/td>\nPoly-Si\u7528\u6e1b\u5727CVD\u88c5\u7f6e<\/span><\/td>\n<\/tr>\n
TEOS-SiO2<\/sub> & Si3<\/sub>N4<\/sub>\u7528\u6e1b\u5727CVD\u88c5\u7f6e<\/span><\/td>\nBPSG\u7528\u30d7\u30e9\u30ba\u30deCVD\u88c5\u7f6e<\/span><\/td>\n<\/tr>\n
Si\u7cfbReactive Ion Etching(RIE)\u88c5\u7f6e<\/span><\/td>\nMetal\u7cfbRIE\u88c5\u7f6e<\/span><\/td>\n<\/tr>\n
O2<\/sub>\u30a2\u30c3\u30b7\u30f3\u30b0\u88c5\u7f6e<\/span><\/td>\n\u7570\u65b9\u6027\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0(TMAH)<\/span><\/td>\n<\/tr>\n
\u96fb\u5b50\u7dda\u63cf\u753b\u88c5\u7f6e<\/span><\/td>\ng\u7dda\u30b9\u30c6\u30c3\u30d1<\/span><\/td>\n<\/tr>\n
i\u7dda\u30b9\u30c6\u30c3\u30d1<\/span><\/td>\n\u30ec\u30b8\u30b9\u30c8\u30b3\u30fc\u30bf\u30fb\u30c7\u30a3\u30d9\u30ed\u30c3\u30d1<\/span><\/td>\n<\/tr>\n
\u30b9\u30d4\u30f3\u30ca\u30fc<\/span><\/td>\n\u30b9\u30d7\u30ec\u30fc\u30b3\u30fc\u30bf<\/span><\/td>\n<\/tr>\n
\u30d7\u30ed\u30b8\u30a7\u30af\u30b7\u30e7\u30f3\u30a2\u30e9\u30a4\u30ca<\/span><\/td>\n\u4e21\u9762\u30a2\u30e9\u30a4\u30ca<\/span><\/td>\n<\/tr>\n
\u30b3\u30f3\u30bf\u30af\u30c8\u30a2\u30e9\u30a4\u30ca(2\u30a4\u30f3\u30c1)<\/span><\/td>\n\u30b3\u30f3\u30bf\u30af\u30c8\u30a2\u30e9\u30a4\u30ca(4\u30a4\u30f3\u30c1)<\/span><\/td>\n<\/tr>\n
\u91d1\u7dda\u30ef\u30a4\u30e4\u30dc\u30f3\u30c0\u30fc<\/span><\/td>\n\u30c0\u30a4\u30dc\u30f3\u30c0\u30fc<\/span><\/td>\n<\/tr>\n
\u30c0\u30a4\u30b7\u30f3\u30b0\u88c5\u7f6e<\/span><\/td>\n\u967d\u6975\u63a5\u5408\u88c5\u7f6e<\/span><\/td>\n<\/tr>\n
\u771f\u7a7a\u5bfe\u5fdc\u967d\u6975\u63a5\u5408\u88c5\u7f6e<\/span><\/td>\n\u30a6\u30a7\u30cf\u30d7\u30ed\u30fc\u30d0\u30b7\u30b9\u30c6\u30e0<\/span><\/td>\n<\/tr>\n
\u6e29\u5ea6\u53ef\u5909\u30d7\u30ed\u30fc\u30d0\u30b7\u30b9\u30c6\u30e0<\/span><\/td>\nHg\u30d7\u30ed\u30fc\u30d6\u30b7\u30b9\u30c6\u30e0<\/span><\/td>\n<\/tr>\n
\u534a\u5c0e\u4f53\u30d1\u30e9\u30e1\u30fc\u30bf\u30a2\u30ca\u30e9\u30a4\u30b6<\/span><\/td>\nLCR\u30a4\u30f3\u30d4\u30fc\u30c0\u30f3\u30b9\u30a2\u30ca\u30e9\u30a4\u30b6<\/span><\/td>\n<\/tr>\n
\u30a6\u30a7\u30cf\u30d5\u30e9\u30c3\u30c8\u30cd\u30b9\u30c6\u30b9\u30bf<\/span><\/td>\n\u30a8\u30ea\u30d7\u30bd\u30e1\u30fc\u30bf<\/span><\/td>\n<\/tr>\n
\u5e72\u6e09\u5f0f\u819c\u539a\u8a08<\/span><\/td>\n\u6bb5\u5dee\u5f62\u72b6\u6e2c\u5b9a\u5668<\/span><\/td>\n<\/tr>\n
\u30ec\u30fc\u30b6\u30fc\u9855\u5fae\u93e1<\/span><\/td>\n\u8d70\u67fb\u96fb\u5b50\u9855\u5fae\u93e1(FE-SEM)<\/span><\/td>\n<\/tr>\n
\u5149\u5b66\u5f0f\u9855\u5fae\u93e1<\/span><\/td>\n\u56db\u63a2\u91dd\u62b5\u6297\u6e2c\u5b9a\u5668<\/span><\/td>\n<\/tr>\n
\u30de\u30b9\u30af\u8a2d\u8a08\u30b7\u30b9\u30c6\u30e0(Cadence)<\/span><\/td>\n\u56de\u8def\u30b7\u30df\u30e5\u30ec\u30fc\u30bf(SPICE)<\/span><\/td>\n<\/tr>\n
\u30d7\u30ed\u30bb\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30bf(SUPREM)<\/span><\/td>\n\u6709\u9650\u8981\u7d20\u89e3\u6790\u30b7\u30b9\u30c6\u30e0(ANSYS)<\/span><\/td>\n<\/tr>\n
\u30c7\u30d0\u30a4\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30bf(SPECTRA)<\/span><\/td>\n3\u6b21\u5143\u5149\u5b66\u30b7\u30df\u30e5\u30ec\u30fc\u30bf(TOCCATA)<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

\u8d85\u7d14\u6c34\u88fd\u9020\u88c5\u7f6e \u5316\u5b66\u51e6\u7406\u7528\u30af\u30ea\u30fc\u30f3\u30d9\u30f3\u30c1 N2\u30d6\u30ed\u30fc\u30ac\u30f3 \u56de\u8ee2\u5f0f\u30a6\u30a7\u30cf\u4e7e\u71e5\u6a5f 4\u30a4\u30f3\u30c1\u5bfe\u5fdc\u9178\u5316\u30fb\u30a2\u30cb\u30fc\u30eb\u7089 4\u30a4\u30f3\u30c1\u5bfe\u5fdc\u30ea\u30f3\u62e1\u6563\u7089 \u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e Al\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e \u91d1\u5c5e\u819c(3\u5143)\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e Poly-Si\u7528\u6e1b\u5727CVD […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[8],"tags":[],"_links":{"self":[{"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/posts\/125"}],"collection":[{"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=125"}],"version-history":[{"count":6,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/posts\/125\/revisions"}],"predecessor-version":[{"id":384,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=\/wp\/v2\/posts\/125\/revisions\/384"}],"wp:attachment":[{"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=125"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=125"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/int.ee.tut.ac.jp\/icg\/wp\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=125"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}