BERKELEY SENSOR & ACTUATOR CENTER
Affiliation:
UC BERKELEY, USA
Comment: 世界のBSAC!

MEMS@MIT
Affiliation:
Massachusetts Institute of Technology, USA
Comment:

microfab
Affiliation:
University of Utah, USA
Comment: Si Probeが有名

MEMS Laboratory
Affiliation:
Carnegie Mellon University, USA
Comment:

METUMEMS
Affiliation:
Middle East Technical University, Turkey
Comment: Prof.AKINの研究グループ